FORM 4 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person * Anderson Bradley Clark   2. Issuer Name and Ticker or Trading Symbol AMTECH SYSTEMS INC [ASYS] 5. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) Chief Financial Officer (Last) (First) (Middle) 131 SOUTH CLARK DRIVE 3. Date of Earliest Transaction (Month/Day/Year) 02/11/2014 (Street) TEMPE, AZ 85281 4. If Amendment, Date Original Filed(Month/Day/Year) 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned

1.Title of Security (Instr. 3) 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4) Code V Amount (A) or (D) Price Amtech Systems, Inc. $.01 par value common stock 02/11/2014   M   15,637 A $ 2.95 55,153 D   Amtech Systems, Inc. $.01 par value common stock 02/11/2014   S   15,637 D $ 9.4127 39,516 D   Amtech Systems, Inc. $.01 par value common stock 02/11/2014   M   7,500 A $ 3.8 47,016 D   Amtech Systems, Inc. $.01 par value common stock 02/11/2014   S   7,500 D $ 9.4127 39,516 D   Amtech Systems, Inc. $.01 par value common stock 02/12/2014   M   9,361 A $ 2.95 48,877 D   Amtech Systems, Inc. $.01 par value common stock 02/12/2014   S   9,361 D $ 9.3862 39,516 D

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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 3)

2. Conversion or Exercise Price of Derivative Security

3. Transaction Date (Month/Day/Year)

3A. Deemed Execution Date, if any (Month/Day/Year)

4. Transaction Code (Instr. 8)

5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4, and 5)

6. Date Exercisable and Expiration Date (Month/Day/Year)

7. Title and Amount of Underlying Securities (Instr. 3 and 4)

8. Price of Derivative Security (Instr. 5)

9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)

10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4)

11. Nature of Indirect Beneficial Ownership (Instr. 4)

Code

V

(A)

(D)

Date Exercisable

Expiration Date

Title

Amount or Number of Shares

Amtech Systems, Inc. Employee Stock Option

$ 2.95

02/11/2014

M

15,637

07/01/2013

12/11/2022

Amtech Systems, Inc. $.01 par value common stock

15,637

(1)

24,363 (2)

D

Amtech Systems, Inc. Employee Stock Option

$ 3.8

02/11/2014

M

7,500

12/09/2012

12/09/2018

Amtech Systems, Inc. $.01 par value common stock

7,500

(1)

7,500 (2)

D

Amtech Systems, Inc. Employee Stock Option

$ 2.95

02/12/2014

M

9,361

07/01/2013

12/11/2022

Amtech Systems, Inc. $.01 par value common stock

9,361

(1)

15,002 (3)

D

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Anderson Bradley Clark 131 SOUTH CLARK DRIVE TEMPE, AZ 85281			Chief Financial Officer

Signatures

Robert T. Hass on behalf of Bradley Anderson by Power of Attorney		02/13/2014
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 4(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	Price omitted because the transaction is a grant of a stock option.
(2)	This is the number of derivative securities, with the same terms and conditions, following the reported transaction.
(3)	This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 117,075, net of options cancelled.

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