SCHEDULE 14A
                                 (Rule 14a-101)

                     INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION

                    PROXY STATEMENT PURSUANT TO SECTION 14(A)
                     OF THE SECURITIES EXCHANGE ACT OF 1934

Filed by the Registrant                       |X|
Filed by a party other than the Registrant    |_|

Check the appropriate box:

|_|  Preliminary Proxy Statement           |_|  Confidential, for Use of the
|X|  Definitive Proxy Statement                 Commission Only (as permitted by
|_|  Definitive Additional Materials            Rule 14a-6(e)(2))
|_|  Soliciting Material Pursuant to
     Rule 14a-11(c) or Rule 14a-12

                            NANOMETRICS INCORPORATED
           ----------------------------------------------------------
                (Name of Registrant as Specified in Its Charter)


    ------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

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      paid  previously.  Identify the previous filing by registration  statement
      number, or the Form or Schedule and the date of its filing.
(1)   Amount previously paid:
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                           NANOMETRICS INCORPORATED

                   NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

TO THE SHAREHOLDERS:

      NOTICE  IS  HEREBY  GIVEN  that the  Annual  Meeting  of  Shareholders  of
Nanometrics Incorporated, a California corporation (the "Company"), will be held
on Wednesday, May 14, 2003 at 1:30 p.m., local time, at the principal offices of
the Company located at 1550 Buckeye Drive,  Milpitas,  California 95035, for the
following purposes:

      1.    To elect five  directors  to serve until the next Annual  Meeting of
            Shareholders or until their successors are elected.

      2.    To ratify the  appointment  of Deloitte & Touche LLP as  independent
            auditors of the Company  for the fiscal  year  ending  December  31,
            2003.

      3.    To  approve  the  adoption  of the  Company's  2003  Employee  Stock
            Purchase Plan and the  reservation of 750,000 shares of common stock
            for issuance thereunder.

      4.    To  transact  such other  business as may  properly  come before the
            meeting or any adjournment thereof.

      The  foregoing  items of business  are more fully  described  in the Proxy
Statement accompanying this Notice.

      Only  shareholders of record at the close of business on April 1, 2003 are
entitled to notice of and to vote at the meeting and any adjournment thereof.

      All  shareholders  are cordially  invited to attend the meeting in person.
However,  to ensure your  representation at the meeting,  you are urged to mark,
sign,  date and return the  enclosed  proxy card as  promptly as possible in the
postage-prepaid  envelope enclosed for that purpose.  Any shareholder  attending
the meeting may vote in person even if such shareholder returned a proxy.

                                        Sincerely,
                                        Vincent J. Coates
                                        Secretary

Milpitas, California
April 17, 2003


                            NANOMETRICS INCORPORATED
                                 PROXY STATEMENT
                 INFORMATION CONCERNING SOLICITATION AND VOTING

General

      The  enclosed  proxy is  solicited  on behalf of the Board of Directors of
Nanometrics  Incorporated  (the  "Company")  for use at the  Annual  Meeting  of
Shareholders of the Company (the "Annual Meeting") to be held on Wednesday,  May
14,  2003 at 1:30 p.m.,  local  time,  or at any  adjournment  thereof,  for the
purposes set forth herein and in the  accompanying  Notice of Annual  Meeting of
Shareholders.  The Annual  Meeting will be held at the principal  offices of the
Company located at 1550 Buckeye Drive, Milpitas, California 95035. The Company's
telephone number at that address is (408) 435-9600.

      These proxy solicitation  materials were mailed on or about April 17, 2003
to all  shareholders  entitled to vote at the meeting.  A copy of the  Company's
2002 Annual Report on Form 10-K accompanies this Proxy Statement.  The Company's
2002 Annual  Report on Form 10-K is also  available on the Security and Exchange
Commission's website at www.sec.gov.

Record Date and Shares Outstanding

      Shareholders  of  record at the  close of  business  on April 1, 2003 (the
"Record  Date") are  entitled  to notice of and to vote at the  meeting.  At the
Record Date, 12,006,641 shares of common stock of the Company, no par value (the
"Common  Stock"),  were  issued  and  outstanding.  For  information  concerning
security  ownership of management and  beneficial  owners of more than 5% of the
outstanding  Common  Stock,  see "Security  Ownership of Management  and Certain
Beneficial Owners" below.

Revocability of Proxies

      Any proxy given pursuant to this solicitation may be revoked by the person
giving it at any time before its use by (i)  delivering  to the Secretary of the
Company a written  notice of revocation or a duly executed proxy bearing a later
date or (ii) attending the meeting and voting in person.

Voting and Solicitation

      The  candidates  receiving the five highest vote totals will be elected to
serve as directors.  Every shareholder  voting for the election of directors may
(i) cumulate such  shareholder's  votes and give one candidate a number of votes
equal to the  number of  directors  to be  elected  multiplied  by the number of
shares that such shareholder holds or (ii) distribute such  shareholder's  votes
on the same principle  among as many  candidates as the  shareholder may select,
provided that votes cannot be cast for more than five  candidates.  However,  no
shareholder  shall be  entitled to  cumulate  votes for a  candidate  unless the
candidate's  name has been  placed in  nomination  prior to the  voting  and the
shareholder, or any other shareholder,  has given notice at the meeting prior to
the voting of the intention to cumulate votes. On all other matters,  each share
of Common Stock outstanding has one vote.

      The cost of this solicitation  will be borne by the Company.  In addition,
the  Company  may  reimburse  brokerage  firms  and other  persons  representing
beneficial  owners  of shares  for their  expenses  in  forwarding  solicitation
material to such beneficial owners.  Proxies may also be solicited by certain of
the Company's  directors,  officers and regular  employees,  without  additional
compensation, personally or by telephone.

Quorum; Abstentions: Broker Non-Votes

      The required  quorum for the transaction of business at the Annual Meeting
is a majority of the shares of Common Stock issued and outstanding on the Record
Date.  Shares that are voted "FOR,"  "AGAINST"  or "WITHHELD  FROM" a matter are
treated as being  present at the meeting for purposes of  establishing  a quorum
and are also treated as shares  "represented  and voting" at the Annual  Meeting
("Votes Cast") with respect to such matter.


                                       1


      While there is no definitive statutory or case law authority in California
as to the proper treatment of abstentions, the Company believes that abstentions
should be counted for purposes of  determining  both (i) the presence or absence
of a quorum for the  transaction  of business and (ii) the total number of Votes
Cast with respect to a proposal.  In the absence of controlling precedent to the
contrary, the Company intends to treat abstentions in this manner.  Accordingly,
abstentions will have the same effect as a vote against a proposal.

      Broker  non-votes will be counted for purposes of determining the presence
or absence of a quorum for the transaction of business,  but will not be counted
for purposes of determining the number of Votes Cast with respect to a proposal.

Deadline for Receipt of Shareholder Proposals

      The attached proxy card grants the proxy holders  discretionary  authority
to vote on any  matter  raised  at the 2003  Annual  Meeting.  Shareholders  are
entitled  to present  proposals  for action at the 2004  Annual  Meeting if such
proposals  comply  with  the  requirements  of the  proxy  rules.  Proposals  of
shareholders  of  the  Company  which  are  intended  to be  presented  by  such
shareholders  at the  Company's  2004  Annual  Meeting  must be  received by the
Company no later than  December  19,  2003 in order that they may be included in
the proxy statement and form of proxy relating to that meeting.

      If a shareholder  intends to submit a proposal at the 2004 Annual  Meeting
that is not  intended  to be  included  in the proxy  statement  and proxy,  the
shareholder  must do so no later than March 3, 2004.  The proxy holders will not
be  allowed  to use  their  discretionary  authority  to vote  on any  proposals
received  after  this date when such  proposals  are  raised at the 2004  Annual
Meeting.

Matters Not Required to be Submitted to Security Holders

      The Company is submitting to the  shareholders the proposal to approve the
appointment of Deloitte & Touche LLP as independent  auditors of the Company for
the fiscal year ending  December 31, 2003.  Although the Company is not required
to submit such proposal to a vote of the  shareholders,  the Company has done so
in order to obtain shareholder ratification of the proposal. If the shareholders
do not vote in favor of the  appointment  of Deloitte & Touche LLP,  the Company
will consider the selection of other auditors.


                                       2


                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS

Nominees

      A board of five directors is to be elected at the Annual  Meeting.  Unless
otherwise  instructed,  the proxy holders will vote the proxies received by them
for the Company's five nominees named below, all of whom are presently directors
of the  Company.  In the event  that any  nominee  of the  Company  is unable or
declines to serve as a director at the time of the Annual  Meeting,  the proxies
will be voted for any nominee who shall be  designated  by the present  Board of
Directors  to fill the  vacancy.  The proxy  holders  intend to vote all proxies
received by them in such a manner and in accordance  with  cumulative  voting as
will ensure the  election of as many of the  nominees  listed  below as possible
and, in such event, the specific  nominees to be voted for will be determined by
the proxy holders. The Company is not aware of any nominee who will be unable or
will decline to serve as a director.  The term of office of each person  elected
as a director will continue  until the next Annual  Meeting of  Shareholders  or
until such director's successor has been elected and qualified.

      The names of the nominees and certain information about them are set forth
below:

          Name of Nominee                         Age     Director Since
          ---------------                         ---     --------------
          Vincent J. Coates .................      78          1975
          Nathaniel Brenner .................      76          1986
          John D. Heaton ....................      43          1995
          Edmond R. Ward ....................      63          1999
          William G. Oldham .................      64          2000

      Vincent J.  Coates has been  Chairman  of the Board  since the Company was
founded in 1975. He has been the Company's Secretary since February 1989. He has
also served as Chief Executive Officer through April 1998 and President from the
founding  through May 1996,  except for the period January 1986 through February
1987 when he served exclusively as Chief Executive Officer.  Mr. Coates has also
served as Chairman of the Board of  Nanometrics  Japan Ltd., a subsidiary of the
Company,  since its  inception  in November  1984.  Prior to his  employment  at
Nanometrics,  Mr. Coates co-founded Coates and Welter Instrument Corporation,  a
designer of electron microscopes, the assets of which were subsequently acquired
by Nanometrics.  Mr. Coates also spent over twenty years working in engineering,
sales  and  international  operations  for  the  Perkin-Elmer   Corporation,   a
manufacturer  of  analytical  instruments.  In 1995,  he received an award which
recognized his contribution to the industry from Semiconductor and Equipment and
Materials International, an industry trade organization.

      Nathaniel Brenner has served as a director of the Company since June 1986.
In 1992,  Mr.  Brenner  retired  from Beckman  Instruments,  Inc., a provider of
laboratory  instrument  systems,  where,  since 1976,  he held the  positions of
Program   Manager,   Marketing   Manager   (Instruments)   and  General  Manager
(Spectroscopy).

      John D. Heaton has served as a director  of the  Company  since July 1995.
Since April 1998, he has been Chief Executive  Officer of the Company.  From May
1996 to April 1998,  he served as the Company's  President  and Chief  Operating
Officer.  Mr. Heaton has also served as President of  Nanometrics  Japan Ltd., a
subsidiary of the Company,  since January  1998.  Beginning in 1978,  Mr. Heaton
served in various technical positions at National Semiconductor, a semiconductor
manufacturer, prior to joining the Company in 1990.

      Edmond R. Ward has served as a director  of the  Company  since July 1999.
Beginning in January  2002,  Mr. Ward has served as Chief  Technical  Officer of
Unity  Semiconductor,  a semiconductor design and manufacturing  company.  Since
April 1999, Mr. Ward has been a General Partner of Virtual  Founders,  a venture
capital firm.  From April 1992 to June 1997,  Mr. Ward was the Vice President of
Technology  at  Silicon  Valley  Group,  Inc.,  a supplier  of wafer  processing
equipment.


                                       3


      William G. Oldham has served as a director of the Company since June 2000.
Since  1964,  Mr.  Oldham  has  been  a  faculty  member  at the  University  of
California,  Berkeley,  where he researches  EUV and Maskless  Lithography  and,
since 1996, has been the Director of the DARPA/SRC Research Network for Advanced
Lithography.  He has served as a  consultant  in various  intellectual  property
matters and serves on the board of directors of Cymer, Inc., a supplier of light
sources  for  deep  ultraviolet  (DUV)  photolithography  systems  used  in  the
manufacturing of semiconductors.

      THE BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS THAT THE SHAREHOLDERS VOTE
"FOR" THE NOMINEES SET FORTH HEREIN.


                                       4


Security Ownership of Management and Certain Beneficial Owners

      The following table sets forth beneficial ownership of Common Stock of the
Company as of April 1, 2003, by each  director or nominee,  by each of the Named
Officers (as defined below), by all directors and Named Officers as a group, and
by all persons known to the Company to be the beneficial  owners of more than 5%
of the Company's Common Stock. Unless otherwise  indicated,  the address of each
beneficial  owner of 5% of the  Company's  Common Stock is 1550  Buckeye  Drive,
Milpitas, California 95035.



                                                                          Number of Shares of
                                                                              Common Stock         Percent of
                       Name of Beneficial Owner                          Beneficially Owned(1)       Total
                       ------------------------                          ---------------------     ----------
                                                                                                
Vincent J. Coates(2) ................................................          3,376,274              28.1%
Wasatch Advisors, Inc.(3) ...........................................          1,627,217              13.6
 150 Social Hall Avenue
 Salt Lake City, UT 84111
FMR Corp.(4) ........................................................          1,186,400               9.9
 82 Devonshire Street
 Boston, MA 02109
Capital Group International, Inc.(5) ................................          1,110,780               9.3
 11100 Santa Monica Blvd.
 Los Angeles, CA 90025
John D. Heaton(6) ...................................................            193,335               1.6
Nathaniel Brenner(7) ................................................             65,299                 *
Edmond R. Ward(8) ...................................................             31,999                 *
Roger Ingalls, Jr. (9) ..............................................             24,000                 *
William Oldham(10) ..................................................             17,665                 *
Paul B. Nolan(11) ...................................................             11,666                 *
Papken Der Torossian(12) ............................................             18,333                 *
All Named Officers and directors as a group (8 persons)(13) .........          3,738,571              30.5


------------
      *     Represents less than 1% of outstanding shares of Common Stock.

      (1)   Beneficial  ownership is determined in accordance  with the rules of
            the Securities and Exchange  Commission  (the "SEC").  The number of
            shares  beneficially  owned by a person  includes  shares  of common
            stock  subject to options  held by that  person  that are  currently
            exercisable  or  exercisable  within 60 days of April 1, 2003.  Such
            shares issuable pursuant to such options are deemed  outstanding for
            computing  the  percentage  ownership  of the  person  holding  such
            options but are not deemed outstanding for the purposes of computing
            the percentage ownership of each other person.

      (2)   Includes  3,376,154  shares  of common  stock  held of record by the
            Vincent J. Coates  Separate  Property  Trust,  U/D/T dated August 7,
            1981, for which Mr. Coates acts as trustee.

      (3)   According  to a Schedule  13G/A filed with the SEC on  February  13,
            2003,  Wasatch  Advisors,  Inc.  may be deemed to be the  beneficial
            owner of 1,627,217 shares of common stock.

      (4)   According  to a Schedule  13G/A filed with the SEC on  February  14,
            2003, FMR Corp.  ("FMR") may be deemed to be the beneficial owner of
            1,186,400 shares of common stock.

      (5)   According  to a Schedule  13G/A filed with the SEC on  February  11,
            2003,  Capital  Group  International,  Inc.  may be deemed to be the
            beneficial owner of 1,110,780 shares of common stock.

      (6)   Includes  150,000  shares of common stock  issuable upon exercise of
            outstanding options exercisable within 60 days of April 1, 2003.

      (7)   Includes 35,300 shares of common stock held of record by The N and J
            Brenner Living Trust Dated March 19, 1990, for which Mr. Brenner and
            his wife act as trustees, and 29,999 shares of common stock issuable
            upon exercise of outstanding  options  exercisable within 60 days of
            April 1, 2003.

      (8)   Includes  29,999  shares of common stock  issuable  upon exercise of
            outstanding options exercisable within 60 days of April 1, 2003.


                                       5


      (9)   Includes  19,000  shares of common stock  issuable  upon exercise of
            outstanding options exercisable within 60 days of April 1, 2003.

      (10)  Includes  16,665  shares of common stock  issuable  upon exercise of
            outstanding options exercisable within 60 days of April 1, 2003.

      (11)  Includes  6,666 shares of common  stock  issuable  upon  exercise of
            outstanding options exercisable within 60 days of April 1, 2003.

      (12)  Includes  15,000  shares of common stock held of record by UBS Paine
            Webber  on behalf of the  Papken S. Der  Torossian  and Clara E. Der
            Torossian,  Family  Revocable  Living Trust Dated April 24, 1992 and
            3,333 shares of common stock  issuable upon exercise of  outstanding
            options  exercisable  within  60 days of  April  1,  2003.  Mr.  Der
            Torossian resigned from the Board of Directors in March of 2003.

      (13)  Includes  255,662  shares of common stock  issuable upon exercise of
            outstanding options exercisable within 60 days of April 1, 2003.

Board Meetings and Committees

      The Board of Directors held meetings (or acted by written consent) a total
of five times during fiscal 2002.  During  fiscal 2002,  no incumbent  directors
attended  less than 75% of the  aggregate of (i) the total number of meetings of
the Board of Directors and (ii) the total number of meetings of  committees,  if
any, upon which such directors served. The Company maintains standing committees
overseeing  audits,  compensation and stock option grants.  The Company does not
have a standing nominating committee.

      Audit Committee. The Audit Committee of the Board of Directors reviews and
monitors the corporate  financial reporting as well as the internal and external
audits of the Company,  including  among other things,  the  Company's  internal
audit and control functions, the results and scope of the annual audit and other
services  provided by the  Company's  independent  auditors,  and the  Company's
compliance  with  legal  matters  that  may  have a  significant  impact  on the
Company's  financial  reports.   In  addition,   the  Audit  Committee  has  the
responsibility  to consider and recommend the  employment  of, and to review fee
arrangements with, the Company's independent auditors.  The Audit Committee also
monitors  transactions  between  the  Company and its  officers,  directors  and
employees  for any  potential  conflicts  of  interest.  The Board of  Directors
adopted a written  charter for the Audit  Committee on March 27, 2001. The Audit
Committee met (or acted by written consent) four times during fiscal 2002.

      The members of the Audit  Committee  during fiscal 2002 were Papken S. Der
Torossian,  Nathaniel  Brenner and Edmond R. Ward. Mr. Der Torossian was elected
to replace  William Oldham on the Audit  Committee on February 27, 2002. At that
time,  he was elected to be the  Chairman of the Audit  Committee  and served in
that capacity until February 26, 2003. Mr. Der Torossian resigned from the Audit
Committee in March 2003. The Company is actively seeking a third Audit Committee
member to fill the vacancy left by Mr. Der Torossian. Currently, Mr. Ward is the
Chairman  of the Audit  Committee.  Messrs.  Brenner  and Ward are  "independent
directors" as that term is defined under the applicable National  Association of
Securities Dealers' ("NASD") listing standards.

      Compensation/Stock  Option  Committee.  On May 15, 2002, the  Compensation
Committee and Stock Option  Committee were combined into the  Compensation/Stock
Option  Committee  of the  Board of  Directors.  The  Compensation/Stock  Option
Committee  now performs the  functions  of the  formerly  separate  Compensation
Committee and Stock Option Committee.

      The Compensation Committee,  now the Compensation/Stock  Option Committee,
reviews  and makes  recommendations  to the  Board of  Directors  regarding  the
Company's  compensation  policy and all forms of  compensation to be provided to
certain of the  executive  officers of the Company.  Prior to May 15, 2002,  the
members of the Compensation  Committee were Nathaniel  Brenner and Papken S. Der
Torossian.  The Compensation  Committee did not meet as a separate  committee in
2002 prior to May 15, 2002.

      The Stock Option Committee,  now the Compensation/Stock  Option Committee,
is  responsible  for  approving  the  grant of stock  options  to the  Company's
employees  under  the  Company's  2000  Employee  Stock  Option  Plan  and  2002
Nonstatutory Stock Option Plan. Prior to May 15, 2002, the members of the


                                       6


Stock Option Committee were Edmond Ward and Nathaniel Brenner.  The Stock Option
Committee met (or acted by written  consent) as a separate  committee four times
prior to May 15, 2002.

      As of May 15, 2002, the current members of the combined Compensation/Stock
Option  Committee  were  Nathaniel  Brenner,  Edmond  Ward  and  Papken  S.  Der
Torossian.  Mr.  Der  Torossian  resigned  from  the  Compensation/Stock  Option
Committee  in March 2003.  Mr.  Brenner is the  Chairman of the  committee.  The
combined  Compensation/Stock  Option Committee met (or acted by written consent)
eight times during fiscal 2002.

Compensation/Stock Option Committee Interlocks and Insider Participation

      No member of the  Compensation/Stock  Option  Committee  of the  Company's
Board of Directors  serves as a member of the board of directors or compensation
committee  of any entity that has one or more  executive  officers  serving as a
member  of  the  Company's  Board  of  Directors  or  Compensation/Stock  Option
Committee.

Board Compensation

      Directors  who are not also  employees  of the  Company  receive an annual
retainer  fee of $5,000 plus $1,000 for each Board of  Directors  and  committee
meeting  attended  (unless the Board of Directors  and  committee  meetings take
place on the same day,  in which case such  directors  receive a $1,000 fee) and
are eligible to participate in the Company's 2000 Directors' Stock Option Plan.

Equity Compensation Plan Information

      The  following  table   summarizes   information   regarding  the  various
stock-based  compensation  plans under which the Company was authorized to issue
equity securities as of December 31, 2002.



                                                                                                       Number of securities
                                                                                                      remaining available for
                                          Number of securities to be    Weighted-average exercise      future issuance under
                                            issued upon exercise of        price of outstanding      equity compensation plans
                                             outstanding options,         options, warrants and        (excluding securities
                                              warrants and rights                 rights             reflected in column (a))
              Plan category                           (a)                          (b)                          (c)
              -------------               --------------------------    -------------------------    -------------------------
                                                                                                  
Equity compensation plans approved
   by security holders(1) ..............           1,410,594                     $ 14.27                   2,044,969(2)
Equity compensation plans not
   approved by security holders(3) .....                  --                          --                   1,200,000
                                                   ---------                     -------                   ---------
   Total ...............................           1,410,594                     $ 14.27                   3,244,969
                                                   =========                     =======                   =========


------------
(1)   Consists of the 1991 Stock Option Plan,  as amended,  the 1991  Directors'
      Stock Option Plan,  the 2000 Stock Option Plan,  as amended,  and the 2000
      Directors'  Stock Option Plan.  The Company no longer issues options under
      the 1991 Stock  Option  Plan,  as amended,  or the 1991  Directors'  Stock
      Option Plan.

(2)   No shares  remain  available for future  issuance  under the 1986 Employee
      Stock  Purchase  Plan, as amended.  The Board of Directors  terminated the
      plan effective September 28, 2002.

(3)   Consists of the Company's 2002 Nonstatutory Stock Option Plan. Pursuant to
      the plan, the Company may grant options to acquire up to 1,200,000  shares
      of common stock to employees and  consultants at prices  determined by the
      administrator at the date of grant.  These options  generally expire seven
      years  from the date of grant,  or a  shorter  term as  provided  in their
      respective stock option  agreements,  and become exercisable in accordance
      with the vesting set forth in their  respective  stock option  agreements.
      The Company did not issue any  options  pursuant to the 2002  Nonstatutory
      Stock Option Plan in fiscal 2002.


                                       7


Compensation of Executive Officers

      The following table sets forth the compensation paid by the Company during
the past three  fiscal years to (i) the Chief  Executive  Officer of the Company
during  the last  fiscal  year,  (ii) each of the four most  highly  compensated
executive  officers (or such lesser number of executive  officers as the Company
may have) of the Company not serving as Chief Executive  Officer and (iii) up to
an additional two individuals  that would have been included under item (ii) but
for the fact that the individuals were not serving as executive  officers at the
end of the last completed fiscal year (collectively, the "Named Officers"):

                           Summary Compensation Table



                                                                                              Long Term
                                                                                            Compensation
                                                        Annual Compensation                    Awards
                                              ----------------------------------------   ------------------
                                                                                             Securities
                                                                                             Underlying
                    Name                       Fiscal Year       Salary        Bonus         Options (#)
-------------------------------------------   -------------   ------------   ---------   ------------------
                                                                                   
John D. Heaton ............................       2002         $ 343,800      $   --           275,000(1)
 President and Chief Executive Officer            2001           344,299       46,551              --
                                                  2000           303,146       70,385          250,000
Vincent J. Coates .........................       2002         $ 204,800      $   --               --
 Chairman of the Board and Secretary              2001           204,800          --               --
                                                  2000           204,800          --               --
Roger Ingalls Jr. .........................       2002         $ 201,834      $   --            25,000(1)
 Vice President of Sales                          2001           234,089       19,802              --
                                                  2000           225,779       38,982           10,000
Paul B. Nolan .............................       2002         $ 162,234      $   --            50,000
 Vice President and Chief Financial Officer       2001           152,561       18,480              --
                                                  2000           137,619       35,023           10,000


------------
(1)   The stock options were  cancelled on December 16, 2002 in connection  with
      the Company's offer to exchange  certain  outstanding  options to purchase
      shares of the Company's common stock for new options.  The Company expects
      to grant such new  options on or about June 17,  2003 at the  then-current
      market price of the Company's common stock at such time.

Stock Options Granted in the Fiscal Year Ended December 31, 2002

      The following table sets forth  information  with respect to stock options
granted  during the fiscal  year ended  December  31,  2002 to each of the Named
Officers. All options were granted under the Company's 2000 Stock Option Plan.


                                       8


      The  potential  realizable  value  amounts in the last two  columns of the
following  chart  represent  hypothetical  gains that could be achieved  for the
respective  options if exercised  at the end of the option term.  The assumed 5%
and 10% annual rates of stock price  appreciation  from the date of grant to the
end of the option term are provided in  accordance  with rules of the SEC and do
not represent  the  Company's  estimate or projection of the future common stock
price.  Actual  gains,  if any, on stock option  exercises  are dependent on the
future performance of the common stock, overall market conditions and the option
holder's continued employment through the vesting period.

                        Option Grants in Last Fiscal Year



                                                  Individual Grants
                              ---------------------------------------------------------
                                Number of     % of Total                                   Potential Realized Value at
                               Securities       Options                                      Assumed Annual Rates of
                               Underlying     Granted to                                  Stock Price Appreciation for
                                 Options       Employees      Exercise                             Option Term
                                 Granted       in Fiscal        Price       Expiration    -----------------------------
            Name                 (#)(1)         Year(2)        ($/Sh)          Date           5% ($)         10% ($)
---------------------------   ------------   ------------   ------------   ------------   -------------   -------------
                                                                                      
John D. Heaton ............     200,000           22.1%      $   19.69        5/15/09      $1,603,161      $3,736,048
John D. Heaton ............      75,000            8.3            5.72        8/14/09         174,646         407,000
Vincent J. Coates .........         --              --              --            --              --              --
Roger Ingalls Jr. .........      25,000            2.8            6.33        8/12/09          64,424         150,134
Paul B. Nolan .............      10,000            1.1           14.75        6/10/09          60,047         139,936
Paul B. Nolan .............      40,000            4.4            6.33        8/12/09         103,078         240,215


------------

(1)   All options  granted to the Named  Officers in fiscal 2002 were granted at
      exercise  prices  equal to the fair market value of the  Company's  common
      stock  on  the  dates  of  grant.  Historically,  options  granted  become
      exercisable at the rate of 33% on the first anniversary date of the option
      grant  and 33% of the  option  shares  become  exercisable  each full year
      thereafter,  such that full  vesting  occurs three years after the date of
      grant.  Options  lapse  after 7  years  or 90 days  after  termination  of
      employment.

(2)   Based on 907,100 options granted during the fiscal year ended December 31,
      2002.

Aggregated  Option  Exercises  in Last  Fiscal Year and Fiscal  Year-End  Option
Values

      The  following  table  sets  forth the  number of shares  covered  by both
exercisable and  unexercisable  stock options held by each of the Named Officers
at December 31, 2002. None of the Named Officers  exercised stock options during
fiscal 2002.




                                                             Number of Securities
                                                           Underlying Unexercisable       Value of Unexercised In-
                                                              Options at Fiscal             the-Money Options at
                                Shares         Value             Year-End (#)             Fiscal Year-End ($)(2)(3)
                              Acquired on    Realized   ------------------------------  -----------------------------
            Name             Exercise (#)     ($)(1)     Exercisable    Unexercisable    Exercisable    Unexercisable
--------------------------- --------------  ----------  -------------  ---------------  -------------  --------------
                                                                                          
John D. Heaton ............       --           $ --        150,000               0           $ --           $ --
Vincent J. Coates .........       --             --            --               --             --             --
Roger Ingalls Jr. .........       --             --         19,000               0             --             --
Paul B. Nolan .............       --             --          6,666          53,334             --             --


------------
(1)   The value  realized  upon  exercise  is (i) the fair  market  value of the
      Company's  common stock on the date of exercise,  less the option exercise
      price per share,  multiplied by (ii) the number of shares  underlying  the
      options exercised.

(2)   The  value of  unexercised  options  is (i) the fair  market  value of the
      Company's  common stock on December  31, 2002 ($4.19 per share),  less the
      option  exercise  price of  in-the-money  options,  multiplied by (ii) the
      number of shares underlying such options.

(3)   None of the individuals  listed held unexercised  in-the-money  options at
      the end of fiscal 2002.


                                       9


Certain Transactions

      Pursuant  to the  terms of an  agreement  dated May 1,  1985  between  the
Company and Vincent J. Coates,  the  Chairman of the Board of the  Company,  the
terms of which were then amended and restated in August 1996 and again effective
April 1998,  the Company is  obligated,  in the event Mr.  Coates is required to
resign as Chairman of the Board under certain circumstances,  including a change
of control, to continue to pay Mr. Coates his salary and benefits for five years
from the date of such resignation.

      In April 1998,  the Company  entered into an agreement with John D. Heaton
under  which the  Company  agreed to pay Mr.  Heaton  his  usual  annual  salary
(excluding  bonuses)  for a period of one year from the date that he is required
or  requested  for any reason not  involving  good cause,  including a change of
control,  to  involuntarily  relinquish  his positions with the Company as Chief
Executive  Officer,  President  and  Director.  If Mr. Heaton leaves the Company
voluntarily  or if he is asked to leave  under  certain  circumstances,  no such
severance payment is required.

      On October 1, 2001, Mr. Heaton issued a promissory  note to the Company in
the principal  amount of  approximately  $301,000 in a  transaction  designed to
provide Mr. Heaton with funds to meet personal needs. The note bears interest at
a rate of 6% and shall  become due and  payable  upon the earlier of (i) 90 days
after the  termination  of Mr.  Heaton's  employment  with the  Company  or (ii)
October 1, 2004.

Section 16(a) Beneficial Ownership Reporting Compliance

      Section 16(a) of the Securities Exchange Act of 1934, as amended, requires
the Company's  executive  officers and directors,  and persons who own more than
ten percent of a registered  class of the Company's equity  securities,  to file
reports  of  ownership  and  changes  in  ownership  with the SEC and the NASDAQ
National  Market.  Executive  officers,  directors  and greater than ten percent
shareholders  are required by SEC regulations to furnish the Company with copies
of all  Section  16(a) forms that they file.  Based  solely on its review of the
copies of such forms  received  by it or written  representations  from  certain
reporting  persons,  the Company believes that during fiscal 2002, its executive
officers,  directors and greater than ten percent shareholders complied with all
applicable filing requirements.


                                       10


Report of the Audit Committee of the Board of Directors

      The  following  is the  report  of the  Audit  Committee  of the  Board of
Directors  describing its review of materials and determinations with respect to
the  Company's  auditors  and  financial  statements  for the fiscal  year ended
December 31, 2002. The information  contained in this report shall not be deemed
to be  "soliciting  material" or to be "filed" with the  Securities and Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

      In accordance  with its written charter adopted by the Board of Directors,
the  Audit   Committee   assists  the  Board  of  Directors  in  fulfilling  its
responsibility  for  oversight of the quality and  integrity of the  accounting,
auditing and  financial  reporting  practices of the Company.  During 2002,  the
Audit  Committee  met (or acted by written  consent)  four times,  and the Audit
Committee  chairman,  as representative of the committee,  discussed the interim
financial  information  contained in quarterly  earnings  announcements with the
Chief Financial Officer and independent auditors prior to public release.

      The Audit  Committee  received from the Company's  independent  auditors a
formal written statement,  consistent with Independence Standards Board Standard
No. 1,  "Independence  Discussions with Audit  Committees,"  which describes all
relationships  between the  auditors  and the  Company  that,  in the  auditors'
professional  opinion,  might  reasonably  be thought  to bear on the  auditors'
independence.   The  Audit   Committee   discussed   with  the  auditors   these
relationships and satisfied itself as to the auditors' independence.

      The Audit  Committee  also  discussed  and reviewed  with the  independent
auditors all communications  required by generally accepted auditing  standards,
including those described in Statement on Auditing Standards No. 61, as amended,
"Communication  with Audit Committees" and, with and without management present,
discussed and reviewed the results of the independent  auditors'  examination of
the Company's financial statements.

      Additionally,   the  Audit  Committee   reviewed  the  audited   financial
statements of the Company as of and for the fiscal year ended  December 31, 2002
with management and the independent auditors.  Management has the responsibility
for the  preparation of the Company's  financial  statements and the independent
auditors have the responsibility for the examination of those statements.

      Based on the foregoing  review and  discussions  with  management  and the
independent  auditors,  the Audit  Committee  recommended  to the Board that the
Company's audited financial  statements be included in its Annual Report on Form
10-K for the fiscal year ended  December 31, 2002 for filing with the Securities
and Exchange Commission. The Audit Committee also recommended the reappointment,
subject to  shareholder  approval,  of the  independent  auditors  and the Board
concurred in such recommendation.

Nathaniel Brenner
Edmond R. Ward


                                       11


Report of the Compensation/Stock Option Committee of the Board of Directors

      The following is the report of the Compensation/Stock  Option Committee of
the  Board  of  Directors  describing   compensation   policies  and  rationales
applicable  to certain of the Company's  executive  officers with respect to the
compensation paid to such executive  officers for the fiscal year ended December
31,  2002.  The  information  contained in such report shall not be deemed to be
"soliciting  material"  or  to be  "filed"  with  the  Securities  and  Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

      General. The Compensation/Stock Option Committee is responsible for making
recommendations  to the Board of  Directors  with  respect to cash  compensation
levels  for  certain of the  Company's  executive  officers.  During  2002,  the
Compensation/Stock  Option Committee also was responsible for determining levels
of equity-based compensation for the Company's employees.

      Compensation  Philosophy.  The  Compensation/Stock  Option Committee makes
recommendations  as to the  salaries  of certain of the  executive  officers  by
considering  (i) the  salaries of  executive  officers in similar  positions  at
comparably-sized  peer companies,  (ii) the Company's financial performance over
the  past  year  based  upon  revenues  and  operating  results  and  (iii)  the
achievement of individual  performance goals related to each executive officer's
duties and areas of  responsibility.  The  Compensation/Stock  Option  Committee
makes recommendations as to the levels of cash bonuses awarded to certain of the
Company's executive officers and views such bonuses as being an integral part of
its performance based  compensation  program.  Such bonuses are based on Company
profits and are determined as a percentage of the officer's salaries.

      Equity-Based  Compensation.  The Compensation/Stock Option Committee views
stock  options  as  an  important  part  of  its  long-term,   performance-based
compensation  program.  The  Compensation/Stock  Option  Committee  grants stock
options to all employees of the Company  under the  Company's  2000 Stock Option
Plan and  2002  Nonstatutory  Stock  Option  Plan  based  upon  the  committee's
estimation  of  each  employee's   contribution  to  the  long-term  growth  and
profitability of the Company.  The 2000 Stock Option Plan is intended to provide
additional  incentives to the executive officers to maximize  shareholder value.
Options are granted  under the 2000 Stock Option Plan and the 2002  Nonstatutory
Stock Option Plan at the then-current  market price and are generally subject to
three-year  vesting  periods  to  encourage  key  employees  to remain  with the
Company.

      Compensation   of  the  President  and  Chief   Executive   Officer.   The
compensation of the Company's  President and Chief  Executive  Officer was based
upon  the  same  criteria  described  above.  Due to  economic  conditions,  the
Compensation/Stock  Option Committee felt that an increase to the base salary of
the  President  and CEO would not be  appropriate.  Additionally,  no management
bonuses, which are based on profits, were paid in 2003.

Nathaniel Brenner
Edmond R. Ward


                                       12


Performance Graph

      Set forth below are two line graphs;  one comparing the annual  percentage
change in the  cumulative  return to the  shareholders  of the Company's  Common
Stock with the  cumulative  return of the NASDAQ  Stock Market Index and the RDG
Technology  Composite  Index for the  period  commencing  on January 1, 1998 and
ending on December 31, 2002 and the other comparing the annual percentage change
in the cumulative  return to the shareholders of the Company's Common Stock with
the cumulative  return of the NASDAQ Stock Market Index and the J.P.  Morgan H&Q
Technology Index (the "H&Q Index") for the period  commencing on January 1, 1997
and ending on December 31, 2001. In each case,  the results are shown based on a
$100  investment  in the stock or index with any dividends  reinvested.  The H&Q
Index, which we presented in our 2001 Proxy Statement, was discontinued in 2002.
As a  result,  we have  included  both  graphs  in the  interest  of  additional
disclosure.

      The information  contained in the performance graph shall not be deemed to
be  "soliciting  material"  or to be "filed"  with the  Securities  and Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

                  COMPARISON OF 5-YEAR CUMULATIVE TOTAL RETURN
        AMONG NANOMETRICS INCORPORATED, NASDAQ STOCK MARKET (U.S.) INDEX
                     AND THE RDG TECHNOLOGY COMPOSITE INDEX

   [The following table was depicted as a line chart in the printed material]



                                                                   Cumulative Total Return
                                       -------------------------------------------------------------------------------
                                          12/97         12/98        12/99         12/00         12/01         12/02
                                       -----------   ----------   -----------   -----------   -----------   ----------
                                                                                              
NANOMETRICS INCORPORATED ...........       100.00        95.42        245.80        168.71        236.95        51.18
NASDAQ STOCK MARKET (U.S.) .........       100.00       140.99        261.48        157.40        124.87        86.38
RDG TECHNOLOGY COMPOSITE ...........       100.00       176.28        348.72        215.64        157.63        93.01



                                       13


                  COMPARISON OF 5-YEAR CUMULATIVE TOTAL RETURN
                         AMONG NANOMETRICS INCORPORATED,
              THE NASDAQ STOCK MARKET (U.S.) INDEX, THE J.P. MORGAN
          H&Q TECHNOLOGY INDEX, AND THE RDG TECHNOLOGY COMPOSITE INDEX

   [The following table was depicted as a line chart in the printed material]



                                                               Cumulative Total Return
                                  ---------------------------------------------------------------------------------
                                     12/96         12/97         12/98         12/99         12/00         12/01
                                  -----------   -----------   -----------   -----------   -----------   -----------
                                                                                          
NANOMETRICS INCORPORATED ........     100.00        172.37        164.47        423.68        290.80        408.42
NASDAQ STOCK MARKET (U.S.) ......     100.00        122.49        172.70        320.28        192.80        152.96
J.P. MORGAN H&Q TECH. INDEX .....     100.00        117.24        182.36        407.27        263.28        181.99
RDG TECHNOLOGY COMPOSITE ........     100.00        128.12        225.86        446.80        276.29        201.96



                                       14


                                 PROPOSAL NO. 2

                         RATIFICATION OF APPOINTMENT OF
                              INDEPENDENT AUDITORS

      The Board has appointed Deloitte & Touche LLP,  independent  auditors,  to
audit the consolidated  financial  statements of the Company for the fiscal year
ending  December  31,  2003.  Deloitte & Touche LLP has  audited  the  Company's
financial statements since fiscal 1991.

      Representatives of Deloitte & Touche LLP are expected to be present at the
Annual Meeting with the opportunity to make a statement if they desire to do so,
and are expected to be available to respond to appropriate questions.

Audit Fees

      The  aggregate  fees billed by Deloitte & Touche LLP,  the member firms of
Deloitte  Touche  Tohmatsu,  and  their  respective  affiliates   (collectively,
"Deloitte & Touche")  for  professional  services  rendered for the audit of the
Company's annual consolidated  financial  statements for the year ended December
31, 2002 and for reviews of the consolidated  financial  statements  included in
the Company's Quarterly Reports on Form 10-Q for that fiscal year were $264,239.

Financial Information Systems Design and Implementation Fees

      The Company  did not engage  Deloitte & Touche for  professional  services
relating to financial  information  systems  design and  implementation  for the
fiscal year ended December 31, 2002.

All Other Fees

      The  aggregate  fees billed by Deloitte & Touche for services  rendered to
the  Company,  other than the  services  described  above under "Audit Fees" and
"Financial  Information Systems Design and Implementation  Fees," for the fiscal
year ended  December 31, 2002 were $222,255 and included tax  compliance and tax
consulting services.

      The Audit  Committee has considered the fees received by Deloitte & Touche
for the provision of financial  information  systems  design and  implementation
services and other services are compatible  with  maintaining  the  accountant's
independence  before  recommending  Deloitte & Touche as the independent auditor
for the next fiscal year.

      THE BOARD OF DIRECTORS UNANIMOUSLY RECOMMENDS THAT SHAREHOLDERS VOTE "FOR"
THE  RATIFICATION  OF THE  APPOINTMENT OF DELOITTE & TOUCHE LLP AS THE COMPANY'S
INDEPENDENT AUDITORS FOR THE FISCAL YEAR ENDING DECEMBER 31, 2003.


                                       15


                                 PROPOSAL NO. 3

           ADOPTION OF THE COMPANY'S 2003 EMPLOYEE STOCK PURCHASE PLAN
             AND THE RESERVATION OF 750,000 SHARES OF THE COMPANY'S
                      COMMON STOCK FOR ISSUANCE THEREUNDER

      As of April 1, 2003,  the Board of Directors of the Company (the  "Board")
adopted the 2003 Employee Stock Purchase Plan (the "Purchase Plan"),  subject to
the approval of the  Company's  shareholders.  The Purchase  Plan is intended to
replace the Company's  1986 Employee  Stock  Purchase  Plan, as amended  through
March  1998  (the  "1986  Purchase  Plan"),  which was  terminated  by the Board
effective  September  28,  2002.  Shareholders  are being  asked to approve  the
adoption of the Purchase Plan and the reservation of 750,000 shares  thereunder.
The fair  market  value of the  Common  Stock as of April 8,  2003 was $3.99 per
share.

      The  Board  believes  that the  Purchase  Plan has been  important  to the
Company's efforts to encourage employee equity participation and increase worker
retention by aligning  employee  interests with those of the  shareholders.  The
Board is pleased with the success of the 1986 Purchase  Plan in  increasing  the
level of employee  interest in the Company's stock price,  and believes that the
offer  of  equity  incentives  to all  employees  has been a key  factor  in the
Company's overall financial  performance.  As of December 31, 2002, no shares of
Common Stock were available for issuance under the Company's 1986 Purchase Plan.

      The following is a summary description of the Purchase Plan under which no
shares  have  yet  been  granted.  However,  this  summary  is  not  a  complete
description  of all the provisions of the Purchase Plan, and is qualified in its
entirety by the specific language of the Purchase Plan.

Summary of the Purchase Plan

      General.  The purpose of the Purchase Plan is to provide employees with an
opportunity to purchase Common Stock of the Company through payroll deductions.

      Administration.  The Purchase Plan may be  administered  by the Board or a
committee  appointed  by the  Board  (the  "Administrator").  All  questions  of
interpretation  or  application  of the  Purchase  Plan  are  determined  by the
Administrator,  and its  decisions  are final,  conclusive  and binding upon all
participants.

      Eligibility.  Each  employee of the Company  (including  officers),  whose
customary employment with the Company is at least twenty (20) hours per week and
more than five (5) months in any calendar  year, is eligible to  participate  in
the  Purchase  Plan;  provided,  however,  that no employee  shall be granted an
option under the Purchase  Plan (i) to the extent  that,  immediately  after the
grant,  such  employee  would own 5% of either the voting  power or value of the
stock of the  Company,  or (ii) to the extent that his or her rights to purchase
stock under all employee stock  purchase plans of the Company  accrues at a rate
which exceeds $25,000 worth of stock (determined at the fair market value of the
shares at the time  such  option  is  granted)  for each  calendar  year.  As of
December 31, 2002, the Company had 305  employees,  all of whom were eligible to
participate in the Purchase Plan.

      Offering Period. The Purchase Plan is implemented by consecutive  offering
periods lasting  approximately six months in duration with a new offering period
commencing  on the first  trading  day (as defined in the  Purchase  Plan) on or
after the last day of the  Company's  first and third  fiscal  quarters  of each
year. To participate in the Purchase Plan, each eligible employee must authorize
payroll  deductions  pursuant to the Purchase Plan. Such payroll  deductions may
not  exceed  10% of a  participant's  compensation.  Compensation  is defined as
regular  straight time gross earnings,  but exclusive of commissions,  overtime,
shift premium,  incentive  compensation,  incentive payments,  bonuses and other
compensation.  Once an employee  becomes a  participant  in the  Purchase  Plan,
Common Stock will  automatically be purchased under the Purchase Plan at the end
of  each  offering  period,  unless  the  participant  withdraws  or  terminates
employment  earlier,  and the employee will  automatically  participate  in each
successive  offering  period until such time as the employee  withdraws from the
Purchase Plan or the employee's employment with the Company terminates.

      Purchase Price.  The purchase price per share at which shares will be sold
in an  offering  under  the  Purchase  Plan is the  lower of (i) 85% of the fair
market value of a share of Common Stock on the first


                                       16


day of the  offering  period or (ii) 85% of the fair market  value of a share of
Common  Stock on the last day of the offering  period.  The fair market value of
the Common  Stock on a given date is  generally  the  closing  sale price of the
Common Stock as reported on the Nasdaq National Market for such date.

      Payment of Purchase Price;  Payroll Deductions.  Payment for the shares is
accumulated by payroll deductions  throughout the offering period. The number of
shares of Common Stock a  participant  may purchase in each  offering  period is
determined by dividing the total amount of payroll deductions  withheld from the
participant's  compensation  during that offering  period by the purchase price.
However,  a  participant  may not purchase  during an offering  period more than
5,000  shares  during  any  offering  period.  During  the  offering  period,  a
participant may discontinue his or her  participation  in the Purchase Plan, and
may decrease or increase the rate of payroll  deductions  in an offering  period
within limits set by the Administrator.

      All  payroll  deductions  made  for a  participant  are  credited  to  the
participant's account under the Purchase Plan, are withheld in whole percentages
only and are included with the general funds of the Company.  Funds  received by
the Company  pursuant to  exercises  under the  Purchase  Plan are also used for
general corporate  purposes.  A participant may not make any additional payments
into his or her account other than through payroll deductions.

      Withdrawal.  A participant may terminate his or her  participation  in the
Purchase Plan at any time by giving the Company a written  notice of withdrawal.
In such event, the payroll deductions credited to the participant's account will
be returned, without interest, to such participant.  Payroll deductions will not
resume unless a new  subscription  agreement is delivered in  connection  with a
subsequent offering period.

      Termination of Employment.  Termination of a participant's  employment for
any reason,  including death,  cancels his or her  participation in the Purchase
Plan  immediately.  In  such  event  the  payroll  deductions  credited  to  the
participant's account will be returned without interest to such participant, his
or her designated beneficiaries or the executors or administrators of his or her
estate.

      Adjustments Upon Changes in Capitalization. In the event of any changes in
the  capitalization  of the Company effected without receipt of consideration by
the  Company,  such as a stock  split,  reverse  stock  split,  stock  dividend,
combination or  reclassification  of the Common Stock,  appropriate  adjustments
will be made by the  Administrator  in the shares subject to purchase and in the
price per  share  under  the  Purchase  Plan.  In the  event of  liquidation  or
dissolution  of the  Company,  the  offering  periods  then in progress  will be
shortened,  a new  exercise  date  will  be set  and the  offering  period  will
terminate  immediately  prior to the consummation of such event unless otherwise
provided by the Administrator.

      In the event of a sale of all or  substantially  all of the  assets of the
Company,  the merger of the Company with or into another  corporation,  or other
change of control of the  Company,  the  successor  corporation  will  assume or
substitute for each outstanding  option. In the event the successor  corporation
refuses to assume or  substitute  for the options,  the offering  period then in
progress  will be shortened  and a new exercise date will be set. In such event,
the Administrator  shall notify each participant at least ten (10) business days
prior to the new exercise date.

      Amendment and Termination.  The  Administrator may at any time and for any
reason amend or terminate  the Purchase  Plan,  except that no such  termination
shall affect options  previously  granted and no amendment shall make any change
in an option  granted prior thereto  which  adversely  affects the rights of any
participant.  Shareholder  approval for amendments to the Purchase Plan shall be
obtained  in such a manner and to such a degree as  required  to comply with all
applicable laws or regulations.  The Purchase Plan will continue in effect until
terminated by the Administrator in accordance with the Purchase Plan.

      Certain Federal Income Tax Information. The following brief summary of the
effect of federal  income  taxation  upon the  participant  and the Company with
respect to the shares  purchased  under the Purchase  Plan.  This summary is not
exhaustive and does not discuss the tax consequences of a participant's death or
the income tax laws of any state or foreign country in which the participant may
reside.

      The  Purchase  Plan,  and the  right  of  participants  to make  purchases
thereunder,  is intended to qualify under the provisions of Sections 421 and 423
of the Code. Under these provisions,  no income will be taxable to a participant
until  the  shares  purchased  under  the  Purchase  Plan are sold or  otherwise
disposed


                                       17


of. Upon sale or other disposition of the shares, the participant will generally
be subject to tax in an amount  that  depends  upon the  holding  period for the
shares. If the shares are sold or otherwise  disposed of more than two (2) years
from the first day of the applicable  offering period and more than one (1) year
from the applicable date of purchase,  the participant  will recognize  ordinary
income  measured as the lesser of (a) the excess of the fair market value of the
shares at the time of such sale or disposition  over the purchase  price, or (b)
an amount  equal to 15% of the fair  market  value of the shares as of the first
day of the applicable  offering  period.  Any additional gain will be treated as
long-term  capital gain. If the shares are sold or otherwise  disposed of before
the expiration of these holding periods, the participant will recognize ordinary
income  generally  measured as the excess of the fair market value of the shares
on the date the shares are purchased  over the purchase  price.  Any  additional
gain or loss on such sale or disposition will be long-term or short-term capital
gain or loss,  depending  on the  holding  period for the  shares.  The  Company
generally is not entitled to a deduction for amounts taxed as ordinary income or
capital gain to a participant except to the extent of ordinary income recognized
by participants  upon a sale or disposition of shares prior to the expiration of
the holding periods described above.

Participation in the Purchase Plan

      Participation  in the Purchase  Plan is voluntary and is dependent on each
eligible  employee's  election to participate and his or her determination as to
the level of payroll  deductions.  Non-employee  directors  are not  eligible to
participate  in the  Purchase  Plan.  Accordingly,  future  purchases  under the
Purchase Plan are not determinable.  However, purchases were made under the 1986
Employee Stock  Purchase Plan, as amended  through March 1998 (the "1986 ESPP"),
in fiscal 2002.

      The  following  table  sets forth  certain  information  regarding  shares
purchased  under  the 1986 ESPP  during  fiscal  2002 for each of the  executive
officers  named in the Summary  Compensation  Table,  for all current  executive
officers as a group and for all other employees who participated in the Purchase
Plan as a group:

                                New Plan Benefits
                        2003 Employee Stock Purchase Plan



                                  Name                                     Dollar Value ($)     Number of Units
-----------------------------------------------------------------------   ------------------   ----------------
                                                                                              
John D. Heaton
 President and Chief Executive Officer ................................        $      0                   0
Vincent J. Coates
 Chairman of the Board and Secretary ..................................               0                   0
Roger Ingalls Jr.
 Vice President of Sales ..............................................               0                   0
Paul B. Nolan
 Vice President and Chief Financial Officer ...........................               0                   0
All current executive officers as a group (4 persons)(1) ..............               0                   0
All other employees (excluding executive officers) as a group .........         568,076             125,403


------------
(1)   Executive officers were eligible to participate in the 1986 Employee Stock
      Purchase Plan, as amended;  however, none of the Named Officers elected to
      do so in fiscal 2002.

Vote Required

      The  affirmative  vote of a majority of the shares of Common  Stock of the
Company  represented  in person or by proxy at the Meeting and  entitled to vote
will be required to approve the adoption of the Purchase Plan.

      THE COMPANY'S BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS A VOTE "FOR" THE
ADOPTION  OF THE 2003  EMPLOYEE  STOCK  PURCHASE  PLAN AND THE  NUMBER OF SHARES
RESERVED FOR ISSUANCE THEREUNDER.


                                       18


                                  OTHER MATTERS

      The  Company  knows of no other  matters  to be  submitted  to the  Annual
Meeting. If any other matters properly come before the Annual Meeting, it is the
intention  of the persons  named in the  enclosed  proxy card to vote the shares
they represent as the Board of Directors may recommend.

                                        THE BOARD OF DIRECTORS

Dated: April 17, 2003


                                       19

--------------------------------------------------------------------------------
PROXY                       NANOMETRICS INCORPORATED
           This Proxy is Solicited on Behalf of the Board of Directors
                       2003 Annual Meeting of Shareholders
                                  May 14, 2003

      The undersigned  shareholder(s) of Nanometrics Incorporated,  a California
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders and Proxy Statement, each dated April 17, 2003, and hereby appoints
Vincent  J.  Coates  and  Paul  B.  Nolan,   and  each  of  them,   Proxies  and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 2003 Annual Meeting
of  Shareholders of Nanometrics  Incorporated  to be held on Wednesday,  May 14,
2003 at 1:30 p.m.,  local time, at the principal  offices of the Company located
at 1550  Buckeye  Drive,  Milpitas,  California,  95035 and at any  adjournments
thereof,  and to vote all  shares  of Common  Stock  which  the  undersigned  is
entitled to vote on the matters set forth below:

ITEM 1. ELECTION OF DIRECTORS:

|_| FOR all nominees listed below      |_| WITHHOLD AUTHORITY
    (except as indicated)                  to vote for all nominees listed below

      If you wish to  withhold  authority  to vote for any  individual  nominee,
strike a line through that nominee's name in the list below:

Vincent J. Coates               Nathaniel Brenner                 John D. Heaton
                  Edmond R. Ward                 William G. Oldham

ITEM 2.  Proposal  to  Ratify  the  Appointment  of  Deloitte  &  Touche  LLP as
         Indpendent Auditors of the Company for the 2003 Fiscal Year.

                  |_| FOR     |_| AGAINST     |_| ABSTAIN

                  (Continued and to be signed, on reverse side)
--------------------------------------------------------------------------------

--------------------------------------------------------------------------------
                           (Continued from other side)

ITEM 3. Proposal to Adopt the Company's  2003 Employee  Stock  Purchase Plan and
        Approve the  Reservation  of 750,000 Shares of Common Stock for Issuance
        under the Plan:

                  |_| FOR     |_| AGAINST     |_| ABSTAIN

      In their  discretion,  the Proxies are  authorized to vote upon such other
business as may properly come before the meeting.

      THIS  BALLOT WILL BE VOTED AS DIRECTED  OR, IF NO  CONTRARY  DIRECTION  IS
INDICATED,  WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS  NAMED  HEREIN,  "FOR"
EACH PROPOSAL  LISTED,  AND AS SAID PROXIES DEEM ADVISABLE ON SUCH OTHER MATTERS
AS MAY COME BEFORE THE MEETING.

                                         Typed or Printed Name(s)

                                         _______________________________________
                                                       Signature

                                         _______________________________________
                                                       Signature

                                         _______________________________________
                                                  Title, if applicable

                                         _______________________________________
                                            Type and number of shares owned

                                         Dated: __________________________, 2003

                                         This  proxy  should be  marked,  dated,
                                         signed by the shareholder(s) exactly as
                                         his  or her  name  appears  hereon  and
                                         returned   promptly  in  the   enclosed
                                         envelope.    Persons   signing   in   a
                                         fiduciary  capacity should so indicate.
                                         If shares are held by joint  tenants or
                                         as  community  property,   both  should
                                         sign.
--------------------------------------------------------------------------------